halbleiter.jpg H.C. Starck Ceramics, the expert company for technical ceramics within the H.C. Starck Group, is a leading producer of ceramic components with many years of experience in product development and manufacturing especially for the microelectronics industry.

We offer a unique and comprehensive product portfolio of aluminum, zirconium, SiN and SiC based ceramics. We have the capabilities to produce complex, customer specific components with high precision and deploy proprietary manufacturing processes. We are a qualified supplier for 300 mm production and 450 mm pilot line equipment.


Materials and Components for Semiconductor Manufacturing

Process Area Components
Materials
Lithography
Electrostatic Chucks
Bearings
EUV-Parts
StarCeram® Si (SiSiC)
StarCeram® A (Al2O3)
Etch
Shower Heads
Focus Rings
Chamber Domes
Plasma Shields
StarCeram® A (Al2O3)
StarCeram® S (SSiC)
StarCeram® N (Si3N4)

CVD and PVD
Gas distribution plates
Cover Rings
Chamber Liners
StarCeram® A (Al2O3)
StarCeram® S (SSiC)
StarCeram® N (Si3N4)

High Temperature
Diffusion, RTP and LPCVD
Liners and Process Tubes
Pedestals
Injectors
StarCeram® Si (SiSiC)
StarCeram® S (SSiC)

Implant
Insulators
Shields
StarCeram® A (Al2O3)

Inspection and Metrology
Electrostatic Chucks
Lift pins
StarCeram® Si (SiSiC)
StarCeram® S (SSiC)
StarCeram® A (Al2O3)
StarCeram® N (Si3N4)
StarCeram® Z (ZrO2)


Spare Parts and Re-Engineering Services for the Semiconductor Industry

gleitringe.pngH.C. Starck Ceramics produces also customized spare parts for semiconductor equipment as precision manufacturing is one of our core competencies. We have many different ceramic materials available (both standard and specialized) in varying grades of purity. And we guarantee competitive lead times from order to delivery.


As a partner for the Semiconductor Industry we also offer re-engineering services:

  • Optimization of ceramic spare parts allows chip makers to increase performance and reduce cost for their equipment

  • Rebuilding of original parts matching material and geometry specifications


Your benefits from working with H.C. Starck Ceramics:

  • Independence from equipment suppliers

  • Local sourcing with high degree of flexibility and quick response time